ATLEX 500 FBG

Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing 

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ATLEX-500-FBG main features:

  • Soft corona preionization
  • HV-solid state pulser
  • Laser head volume < 3l
  • TMC (Total-Metal-Ceramic) Vessel
  • Integrated vacuum pump & halogen filter
  • Air Cooled / Optional Liquid Cooled, active thermal management
  • RS-485, RS232, USB and fiber optic Interface for system integration
  • Flushable optics holder
  • Energy stabilization mode
  • Dynamic fan speed controls
  • Meets European CE-standard
  • RoHS compliance

Details

Applications

  • Fibre Bragg grating writing

Date
  • 30th April 2015
ATLEX-500-FBG Specifications
Gas Medium
ArF KrF Units
Wavelength
193 248 nm
High Voltage Switching Technique
Solid State Switch
Max. Pulse Energy 1
10 15 mJ
Max. Average Power
4.0
 6.5
W
Spatial Coherence (Vertical Beam Direction) >300 >300 µm
Max. Rep Rate
500
 Hz
Pulse Duration 2
5 – 8 ns
Beam Dimensions 2 (V x H)
4 x 6 mm
Beam Divergence 2 (V x H)
1 x 2 mrad
Energy Stability (standard deviation)
< 3 %
Dimensions (LxWxH) click here for details
540 x 470 x 370 mm
Weight
60 kg
Cooling
Cooling Air / Optional Liquid  
Power requirement
230 VAC / 6,3 A / 1 phase / 50-60 Hz  

All specifications are typical data and subject to change without notice due to product improvements.

1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM

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