ATLEX-FBG
Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing
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ATLEX-FBG main features:
- Soft corona preionization
- HV-solid state pulser
- Laser head volume < 3l
- TMC (Total-Metal-Ceramic) Vessel
- Integrated vacuum pump & halogen filter
- Air Cooled / Optional Liquid Cooled, active thermal management
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Dynamic fan speed controls
- Meets European CE-standard
- RoHS compliance
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ATLEX-FBG Specifications
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Gas Medium
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ArF | KrF | Units |
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Wavelength
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193 | 248 | nm |
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High Voltage Switching Technique
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Solid State Switch | ||
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Maximum Pulse Energy 1
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8 | 15 | mJ |
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Stabilized Pulse Energy
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4 | 8 | mJ |
| Stabilized Average Power ATLEX-300-FBG ATLEX-500-FBG |
1.2 2 |
2.4 4 |
W W |
| Max. Rep Rate ATLEX-300-FBG ATLEX-500-FBG |
300 500 |
Hz Hz |
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| Spatial Coherence (Vertical Beam Direction) | >300 | µm | |
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Pulse Duration 2
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5 – 8 | ns | |
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Beam Dimensions 2 (V x H)
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4 x 6 | mm | |
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Beam Divergence 2 (V x H)
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1 x 2 | mrad | |
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Energy Stability (standard deviation)
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< 2 | % | |
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Dimensions (LxWxH)
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540 x 470 x 370 | mm | |
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Weight
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60 | kg | |
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Cooling
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Air / Liquid | ||
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Power requirements
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230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||
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All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at 20Hz; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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ATLEX-L-FBG upon request. |
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