A new generation of compact air-cooled, excimer lasers, designed for low duty cycle applications
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ATLEX-LR Specifications
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Gas Medium
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ArF | Units |
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Wavelength
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193 | nm |
| High Voltage Switching Technique | Solid State Switch | |
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Maximum Pulse Energy 1
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12 | mJ |
| Stabilized Pulse Energy | 4 | mJ |
| Stabilized Average Power | 1.2 | W |
| Max. Rep. Rate | 300 | Hz |
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Pulse Duration 2
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5 | ns |
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Beam Dimensions 2 (V x H)
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4 x 6 | mm |
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Beam Divergence 2 (V x H)
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1 x 2 | mrad |
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Energy Stability (standard deviation)
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< 2 | % |
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Dimensions (LxWxH)
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540 x 470 x 370 | mm |
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Weight
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60 | kg |
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Cooling
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Air | |
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Power requirements
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230 VAC / 6,3 A / 1 phase / 50-60 Hz | |
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All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at 20Hz; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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